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MEMS stands for Micro Electro Mechanical Systems, a system with a three-dimensional microstructure formed with semiconductor processing technology. Murata has been researching its application for inertia sensors including gyro sensors. A comb structure is formed on the silicon substrate of a gyro sensor with microfabrication to detect angular velocity from the change in electric capacitance from Coriolis force generated during rotation. A wide range of applied researches are being conducted beyond sensors, including RF components. |
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Murata has been the leader in development of vibrating gyroscope sensors using piezoelectric ceramics. We have recently hybridized our gyro sensor technology and newly acquired MEMS technology. We have actualized vibration- and shock-resistant MEMS gyro sensors that are far more precise and compact than existing models by using our own transducer structure. This new model with stable temperature characteristics helps improve car navigation system performance. |
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