Synthetic Quartz for surface acoustic wave (SAW) devices (4 inch)

Synthetic Quartz for SAW device
As for the SAW devices to large (4 inches) have been corresponding.
Material properties
Inclusions ≧Grade Ⅱ
Alpha value ≧Grade C
Etch channel density(m-2 ≦30

Standard specification

Diameter Thickness Roughness Principal surface Reference flat orientation Wafer edge treatment
Tolerance
±0.05
Tolerance
±0.05
Tolerance
 of direction
Tolerance of diameter (h)
Tolerance of direction Roughness
Circle Φ6.0 0.15‾ I・II ±15" ±0.2 ±15' #400
Φ8.0 0.15‾ I・II ±15" ±0.2 ±15' #400
Φ8.7 0.20‾ I・II ±15" ±0.2 ±15' #400
Φ79.0 0.50‾ I・II・III ±1' ±0.5 ±15' #400
Φ102.0 0.50‾ I・II・III ±1' ±0.5 ±15' #400
Square 9 x 9 0.15‾ I・II ±15" - - #240
10 x 10 0.15‾ I・II ±15" - - #240
12 x 12 0.15‾ I・II ±15" - - #240
80 x 80 0.50‾ I・II ±1' - - #240
102 x 102 0.50‾ I・II ±1' - - #240
※Above is standard and we can provide the custome products.


  • Surface finish (I) : With a diamond wheel of #1000 (II) : #2000 (III) : Polishing
  • Thickness frequency finish is also available.