Pressure Sensor Elements (Dies)

Murata Electronics manufactures bare Sensor Elements (SCB10H Sensor Element family). SCB10H sensors measure absolute pressure using capacitive measuring principle. These elements are available for special applications. If you are interested please contact mfi-support@murata.com  and we can tell you more about the possibilities in general.
SubTitleIcon6    SCB10H

  • Size 1.4 x 1.4 x 0.85 mm (w x l x h)
  • High pressure shock survival (> 200 bar)
  • High insulation resistance (> 10 GΩ)
  • RoHS compliant
  • Various pressure ranges possible (1.2 - 25 bar)
  • Proven capacitive 3D-MEMS technology
  • Operates at near vacuum applications
Pressure Sensor Elements (Dies)

- Benefits: -

  • Extremely low current consumption
  • High accuracy
  • High capacitance dynamics
  • High overpressure and shock durability

- Applications: -

Medical devices
  • Barometers
  • Altimeters

Parameter Unit B012 B080 B250
Measuring range kPa 30-120 100-800 100-2,500
Capacitance at min. pressure pF 7.8 7.5 7.3
Capacitance at max. pressure pF 11.8 13.4 13.9
Capacitance dynamics pF 4.0 5.9 6.6
Sensitivity fF/kPa 55
(@100 kPa)
6.2
(@350 kPa)
1.3 (@100 kPa)
6.5 (@2,500 kPa)

SCB10H Datasheet(PDF:320KB)

Product Family specifications SCB10H(PDF:404KB)