Pressure Sensor Elements (Dies)

Murata Electronics manufactures bare Sensor Elements (SCB10H Sensor Element family). SCB10H sensors measure absolute pressure using capacitive measuring principle. These elements are available for special applications. If you are interested please contact mfi-support@murata.com and we can tell you more about the possibilities in general.

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SCB10H

Size 1.4 x 1.4 x 0.85 mm (w x l x h)
High pressure shock survival (> 200 bar)
High insulation resistance (> 10 GΩ)
RoHS compliant
Various pressure ranges possible (1.2 - 25 bar)
Proven capacitive 3D-MEMS technology
Operates at near vacuum applications

- Benefits: -

Extremely low current consumption
High accuracy
High capacitance dynamics
High overpressure and shock durability

- Applications: -

Medical devices

Barometers
Altimeters

Parameter	Unit	B012	B080	B250
Measuring range	kPa	30-120	100-800	100-2,500
Capacitance at min. pressure	pF	7.8	7.5	7.3
Capacitance at max. pressure	pF	11.8	13.4	13.9
Capacitance dynamics	pF	4.0	5.9	6.6
Sensitivity	fF/kPa	55 (@100 kPa)	6.2 (@350 kPa)	1.3 (@100 kPa) 6.5 (@2,500 kPa)