Synthetic Quartz Synthetic Quartz for surface acoustic wave (SAW) devices (4 inch)

As for the SAW devices to large (4 inches) have been corresponding.

Synthetic Quartz for SAW device
Material properties
Inclusions ≧Grade Ⅱ
Alpha value ≧Grade C
Etch channel density(m-2 ≦30
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Standard specification
Diameter Thickness Roughness Principal surface Reference flat orientation Wafer edge treatment
Tolerance
±0.05
Tolerance
±0.05
Tolerance
of
direction
Tolerance
of
diameter
(h)
Tolerance
of
direction
Roughness
Circle Φ6.0 0.15‾ I・II ±15" ±0.2 ±15' #400
Φ8.0 0.15‾ I・II ±15" ±0.2 ±15' #400
Φ8.7 0.20‾ I・II ±15" ±0.2 ±15' #400
Φ79.0 0.50‾ I・II・III ±1' ±0.5 ±15' #400
Φ102.0 0.50‾ I・II・III ±1' ±0.5 ±15' #400
Square 9 x 9 0.15‾ I・II ±15" - - #240
10 x 10 0.15‾ I・II ±15" - - #240
12 x 12 0.15‾ I・II ±15" - - #240
80 x 80 0.50‾ I・II ±1' - - #240
102 x 102 0.50‾ I・II ±1' - - #240

※Above is standard and we can provide the custome products.

  • Surface finish (I) : With a diamond wheel of #1000 (II) : #2000 (III) : Polishing
  • Thickness frequency finish is also available.