Silicon Capacitors FAQQHow is the 3D structure of a silicon capacitor formed?

A

We use the BOSCH process based on dry etching technology. The BOSCH process is a technology which is unique to silicon processing and enables etching with a high aspect ratio by rapidly alternating steps of SF6 gas etching and C4F8 protective film formation.

Related terms : SiliconCapacitor(Si-Cap), SiliconIPD(Si-IPD, IntegratedPassiveDevice)

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