Silicon Capacitors FAQQHow is the 3D structure of a silicon capacitor formed?


We use the BOSCH process based on dry etching technology. The BOSCH process is a technology which is unique to silicon processing and enables etching with a high aspect ratio by rapidly alternating steps of SF6 gas etching and C4F8 protective film formation.

Related terms : Silicon Capacitor(Si-Cap), Silicon IPD(Si-IPD, Integrated Passive Device)

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