Pressure SensorPressure sensor elements

Murata Electronics manufactures bare Sensor Elements (SCB10H Sensor Element family). SCB10H sensors measure absolute pressure using capacitive measuring principle. These elements are available for special applications. If you are interested please contact mfi-support@murata.com  and we can tell you more about the possibilities in general.

Inertial force Sensor

SCB10H

  • Size 1.4 x 1.4 x 0.85 mm (w x l x h)
  • High pressure shock survival (> 200 bar)
  • High insulation resistance (> 10 GΩ)
  • RoHS compliant
  • Various pressure ranges possible (1.2 - 25 bar)
  • Proven capacitive 3D-MEMS technology
  • Operates at near vacuum applications
Pressure Sensor Elements (Dies)

Benefits

  • Extremely low current consumption
  • High accuracy
  • High capacitance dynamics
  • High overpressure and shock durability

Applications

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Parameter Measuring range Capacitance at
min. pressure
Capacitance at
max. pressure
Sensitivity Typical application
Unit kPa pF pF fF/kPa
  • Flow parameters
  • Barometers
  • Altimeters
B012 30-120 7.8 11.8 55 (@100 kPa)
B250 100-2,500 7.3 13.9 1.3 (@100 kPa)
6.5 (@2,500 kPa)

Documentation